发明名称 POROUS BODY AND METHOD FOR PRODUCING STRUCTURE
摘要 PROBLEM TO BE SOLVED: To provide a method for producing a porous body having opening parts each with a size smaller than a hole size. SOLUTION: The method for producing a porous body comprises: a stage (A) where a first material in which holes are formed by anodic oxidation is formed on a supporting substrate; a stage (B) where a second material comprising a substance having a hardness lower than that of the first material and forming an oxide by an oxygen element, and in which the oxide does not suffer from anodic oxidation is formed on the upper layer of the first material; a stage (C) where a recessed structure is formed on the surface of the second material; a stage (D) where the first material is exposed in the bottom part of the recessed structure; a stage (E) where the second material is oxidized; and a stage (F) where the first material is subjected to anodic oxidation. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006070321(A) 申请公布日期 2006.03.16
申请号 JP20040254836 申请日期 2004.09.01
申请人 CANON INC 发明人 IMADA AYA;DEN TORU
分类号 C25D11/04;B82B3/00;C25D11/16;C25D11/18;C25D11/20 主分类号 C25D11/04
代理机构 代理人
主权项
地址