| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a projection exposing device which can expose information such as a coupon onto a periphery in division exposure. <P>SOLUTION: All patterns to be transferred onto a printed wiring board 2 by exposure are drawn in a photomask 1, that is, pieces 10 as independent circuit patterns and a coupon 12 to be transferred onto the periphery of the printed wiring board 2 by exposure are drawn. Exposure is carried out as divided into 6 regions by division lines 19 which divide the exposure region. The photomask 1 is mounted on a photomask stage 5, and the exposure region is moved to an irradiation area 70 by a photomask moving device 50 and aligned by an alignment device (not shown in Figure) using an alignment mark 15 and a substrate mark (not shown). After the periphery of the exposure region is masked by a masking device 3, exposure is performed. This procedure is consecutively carried out in each region to complete exposure of the entire printed wiring board 2. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
