| 摘要 |
PROBLEM TO BE SOLVED: To provide a polycyclic lactone (meth)acrylate which can be purified by a simple operation such as crystallization and can improve the stability under lithography conditions which is needed for precisely designing lithography characteristics. SOLUTION: The exo-polycyclic lactone (meth)acrylate is represented by general formulas (1-1) and/or (1-2). In formulas (1-1) and (1-2), X denotes an oxygen atom, a sulfur atom, or a methylene group or ethylene group which may be substituted by a 1-8C alkyl group, R denotes a hydrogen atom or a methyl group, and R<SP>1</SP>and R<SP>2</SP>denote each independently a hydrogen atom or a 1-8C alkyl group. COPYRIGHT: (C)2006,JPO&NCIPI
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