| 摘要 |
PROBLEM TO BE SOLVED: To provide a flow rate control valve for stably moving a valve member while suppressing a large tilt of the valve member, more excellent in responsiveness to variation in gas pressure. SOLUTION: In the flow rate control valve, a tilt preventing means for reducing a space between an outer surface of the valve member and an inner surface of a housing is provided between the valve member and the housing, and at a position of a inflow opening side from a collar part. Thereby, the space where the valve member is swingable in the housing is reduced, and the large tilt of the valve member is suppressed. COPYRIGHT: (C)2006,JPO&NCIPI
|
