| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe unit capable of detecting its lifetime dependent on wear of conductors. SOLUTION: The probe unit is provided with a substrate, a plurality of first conductors formed on the substrate and having first contact sections which are arrayed along one end of the substrate and come in touch with electrodes of a specimen, and a second conductor formed lower than the first contact sections on a part of the substrate between the one end of the substrate and the first contact sections. COPYRIGHT: (C)2006,JPO&NCIPI
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