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发明名称
摘要
申请公布号	JP2006509331(A)	申请公布日期	2006.03.16
申请号	JP20040556947	申请日期	2003.11.19
申请人		发明人
分类号	C23C16/50;H05H1/24;B01J19/08;C23C16/505;H01J37/32;H01L21/304;H01L21/3065	主分类号	C23C16/50
代理机构		代理人
主权项
地址

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