发明名称 |
GAS-COLLECTING UNIT, TEST HEAD, AND IC DEVICE TESTING APPARATUS |
摘要 |
Disclosed is a cover (5) for cooling heating devices which covers an IC device (44) mounted on a substrate (4). A cooling liquid flows through inside of the cover (5) and comes into contact with the IC device (44) for cooling. A groove (bypass) (54) through which air and the cooling liquid can flow is so formed within the cover (5) as to extend from a gas-clogged section where a gas is likely to stagnate to a downstream position of the cooling liquid relative to the gas-clogged section. In the cover (5) for cooling heating devices having such a structure, air in the gas-clogged section flows out through the bypass, thereby efficiently eliminating the gas-clogged section.
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申请公布号 |
KR20060023569(A) |
申请公布日期 |
2006.03.14 |
申请号 |
KR20057024618 |
申请日期 |
2005.12.22 |
申请人 |
ADVANTEST CORP. |
发明人 |
NISHIURA KOEI |
分类号 |
G01R31/26;B01D19/00;G01N1/00;G01R31/28;G12B15/02;H01L23/44;H05K;H05K7/20 |
主分类号 |
G01R31/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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