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发明名称
Novel photoresist monomer having stability to post exposure delay, polymer thereof and photoresist composition containing it
摘要
申请公布号
KR100557594(B1)
申请公布日期
2006.03.10
申请号
KR19990033886
申请日期
1999.08.17
申请人
发明人
分类号
G03F7/039;C07B61/00;C07C41/56;C07C43/305;C08F2/06;C08F4/04;C08F4/34;C08F32/00;C08F222/06;C08F232/00;C08F234/00;C08K5/00;C08K5/04;C08L45/00;G03F7/004;H01L21/027
主分类号
G03F7/039
代理机构
代理人
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