发明名称 |
Optical data storage medium`s e.g. CD, substrate lifting method, involves conducting gas flow between upper substrates of stack before and/or while lifting upper substrate through inner hole of substrates using substrate gripper |
摘要 |
<p>The method involves conducting a gas flow between upper substrates (2) of a stack (4) before and/or while lifting the upper substrate through the inner hole of the substrates using a substrate gripper (10). The gas flow is led into a gap between a spindle that is accommodated in the inner holes and the inner hole of the upper substrate (2). The upper substrate is held by the gripper within an area of the holes by negative pressure. An independent claim is also included for a device for lifting a substrate from a substrate stack.</p> |
申请公布号 |
DE102004041647(A1) |
申请公布日期 |
2006.03.09 |
申请号 |
DE20041041647 |
申请日期 |
2004.08.27 |
申请人 |
STEAG HAMATECH AG |
发明人 |
GUECLUE, ILHAN;MAHNER, BERND |
分类号 |
B65G59/02 |
主分类号 |
B65G59/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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