| 摘要 |
<P>PROBLEM TO BE SOLVED: To realize no change of an adsorption member according to kinds of a substrate, to give no damage to the substrate when the substrate is adsorbed and further to certainly adsorb the substrate. <P>SOLUTION: Two kinds or more of a suction cup 48 of large diameter and a suction cup 50 of small diameter having different diameter of the adsorption pad are mounted to a mounting plate 44 of the substrate conveying device 10 and the kind of the suction cup used is selected according to the kind of a substrate material 200. A negative pressure is generated on the selected suction cup 48 of large diameter or the suction cup 50 of small diameter by a vacuum pump 74 and it is conveyed to a subsequent step. It can be stably conveyed only by changing the suction cup used according to the kind of the substrate material 200 by mounting the suction cup 48 of large diameter and the suction cup 50 of small diameter to the mounting plate 44 without giving damage to the substrate material 200 and dropping off it on the midway of conveying. Further, it is not required that the suction cup is each time replaced according the kind of the substrate material 200 and increase of working efficiency is realized. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
