| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem, wherein request for a plate chucking equipment structure increases in which amount of rise and fall of a plate is also controllable, since further fining and turning stereoscopic of wiring pattern progress along with compactification by further thinning of a device, in the recent semiconductor manufacturing. SOLUTION: A pin elevator is characterized by installing a movable object which can move on a slope portion in which an inclination passage was formed, a rising and falling portion having a pin portion which is made to abut on an inclined surface of the slope portion, slid or rotated on the inclined surface, by driving of the movable member and elevated perpendicularly and by which a plate is lifted, and a regulation means which gives elastic force which resists perpendicular lifting of the rising and falling portion and regulates horizontal move of the rising and falling portion. Plate zipper equipment which uses the pin elevator is provided. COPYRIGHT: (C)2006,JPO&NCIPI |
