| 摘要 |
PROBLEM TO BE SOLVED: To reduce useless time not contributing to formation of a sample image by suppressing ringing in a scanning driving signal, and to reduce damage generated in the sample. SOLUTION: This charged particle beam device is provided with a deflector 4 making a charged-particle beam 21 emitted from a charged-particle beam source 1 scan on the sample 5 and a signal former forming the scanning digital signal converted into a scanning driving signal supplied to the deflector 4. The fall time of the scanning digital signal is prolonged as the amplitude of the scanning digital signal becomes larger. The ringing occurring in the scanning driving signal becomes easier to occur as the steepness of a change of the scanning driving signal becomes larger, however, in this invention, the fall time of the scanning driving signal is set longer as the amplitude becomes larger by the control. Thus, the ringing in the scanning driving signal can be suppressed. COPYRIGHT: (C)2006,JPO&NCIPI
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