| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic latent image measuring device capable of measuring accurately a latent image formed on the surface of a latent image carrier, and an evaluation method and a device of the latent image carrier using the device. SOLUTION: This electrostatic latent image measuring device has a sample installation part 30 for charging a photoreceptor sample 50, an exposure part 20 for forming an electrostatic latent image by irradiating the sample surface of the charged photoreceptor sample 50 with light, a charged particle irradiation part 10 for irradiating the sample surface of the photoconductive sample where the electrostatic latent image is formed with a charged particle beam, a secondary electron detection part 40 for detecting secondary charged particles discharged from the sample surface of the photoreceptor sample 50 by being irradiated with the charged particle beam, a charge distribution state measuring means for measuring the charge distribution state on the sample surface of the photoreceptor sample 50 based on a detection result of the secondary electron detection part, and a sample bias component changing means for changing a bias component of the electric field intensity on the sample surface of the photoreceptor sample 50. The sample bias component changing means includes a transparent conductive member 60 arranged on the sample surface of the photoreceptor sample. COPYRIGHT: (C)2006,JPO&NCIPI
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