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发明名称
Rohling für gedämpfte Phasenschiebermaske sowie entsprechende Maske
摘要
申请公布号
DE60014842(T2)
申请公布日期
2006.03.09
申请号
DE20006014842T
申请日期
2000.12.15
申请人
DAI NIPPON PRINTING CO., LTD.
发明人
MOTONAGA, TOSHIAKI;YOKOYAMA, TOSHIFUMI;OKAMURA, TAKAFUMI;KINASE, YOSHINORI;MOHRI, HIROSHI;FUJIKAWA, JUNJI;NAKAGAWA, HIRO-O;SUMIDA, SHIGEKI;YUSA, SATOSHI;OHTSUKI, MASASHI
分类号
H01L21/027;B32B17/06;G03F1/00
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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