| 摘要 |
PROBLEM TO BE SOLVED: To prevent an electron beam resist film from being stripped in the course and to stably write a core layer pattern on a desired position in the electron beam resist film even with long-time electron beam irradiation. SOLUTION: A manufacturing method of an optical waveguide with which the core layer pattern is formed on a high refractive index glass layer on a glass substrate is constituted as follows; an adhesiveness strengthening liquid such as hexamethyl disilazane liquid is applied on the high refractive index glass layer (step 2), thereafter, heat treatment is performed at a prescribed temperature (step 3), an electron beam resist is applied thereon (step 4), thereafter, heat treatment is performed at a prescribed temperature (step 5), an antistatic agent liquid is applied thereon (step 6), the core layer pattern is irradiated with an electron beam thereon (step 7), the core layer pattern is written and, subsequently, the antistatic agent liquid is stripped by pure water cleaning (step 8), the core layer pattern is thermally treated at a prescribed temperature (step 9), development is performed (step 10), thereafter, pure water cleaning and drying are performed (step 11) and the core layer pattern of the electron beam resist is thus formed. COPYRIGHT: (C)2006,JPO&NCIPI |
