DLC FILM AND METHOD FOR FORMING THE SAME

摘要

A DLC film functioning as an optical element and enabling easy reduction in size and easy integration and a method for forming the DLC film. A DLC film having a refractive index varying continuously in at least one width direction from the center (O) of the film. More specifically, a DLC film having a refractive index decreasing continuously in at least one width direction from the center (O) of the film and having a function as a convex lens. A DLC film having a refractive index increasing continuously in at least one width direction from the center of the film and having a function as a concave lens. A DLC film having a refractive index varying continuously in the thickness direction. A method for forming a DLC film in which the refractive index is varied continuously in at least one width direction and in at least one thickness direction from the center of the film through irradiation with an energy beam.