| 摘要 |
<P>PROBLEM TO BE SOLVED: To shorten measuring time in the case of measuring the contour shape of an object to be measured in an image measuring machine. <P>SOLUTION: This image measuring machine is provided with an imaging part 4 for imaging the object to be measured 6 mounted onto a stage 5 and outputting imaged images, a moving device for relatively moving the object to be measured 6 mounted onto the stage 5 to an imaging location to be imaged by the imaging part 4, and a control unit 2. The control unit 2 is provided with an imaging control part for controlling the moving device to relatively move the location of a previously set measuring point of the object to be measured to the imaging part 4 and making the imaging part 4 image and output images of the object to be measured 6 at the imaging location, an image processing part for determining coordinate values of a plurality of measuring points in the images outputted from the imaging part 4, and a location determining part for determining a plurality of candidate locations for moving the locations of the measuring points of the object to be measured 6 to the imaging location and determining the candidate location including the most measuring points among the plurality of candidate locations as a location to which the next movement is to be made. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
