摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an inexpensive and reliable thermal flow measuring device capable of precisely detecting the flow even under a thermally severe environment such as engine room. <P>SOLUTION: All resistances constituting a constant temperature difference control are formed of temperature-sensitive bodies of the same material in the same substrate. Thus, the resistances for the constant temperature difference control are exposed to the same environmental condition. Therefore, even if change over time occurs, substantially similar change over time occurs. When the resistances for the constant temperature difference control change over time at the same ratio, the output error becomes very small. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |