| 摘要 |
PROBLEM TO BE SOLVED: To provide a sensor device of high versatility with its characteristics variably set as desired by a user according to its request. SOLUTION: This sensor device made up of three chips, that is, a sensor chip 2 comprising strain resistances Rh1 to Rh4 provided on a diaphragm part surface, a processing circuit chip 11 for processing a detection signal obtained by the sensor chip 2, and a characteristic adjustment chip 121 for adjusting the characteristics of a processing signal Vout processed by the circuit chip 11. The circuit chip 11 is provided with terminals T11 to T13 for adjusting the changing characteristics of the processing signal Vout corresponding to the pressure function of the processing signal Vout, that is, the impressing manner of a pressure applied on the sensor chip 2. Here, the adjustment chip 121 generates two patterns of adjustment signals for adjusting the pressure function of the processing signal Vout, to selectively output the two patterns of adjustment signals to the terminals T11 to T13, respectively, of the circuit chip 11. COPYRIGHT: (C)2006,JPO&NCIPI
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