| 摘要 |
PROBLEM TO BE SOLVED: To provide a handling device, hardly influenced by the temperature of an object, and suitably conveying the object. SOLUTION: This handling device 9 includes a device body 11 moved in the vertical direction and in the horizontal direction. The device body 11 is provided with a plurality of air chucks 12 having paired holding parts nipping and holding the object W. Each air chuck 12 is controlled to move in the horizontal direction and in the vertical direction to the device body 11. COPYRIGHT: (C)2006,JPO&NCIPI
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