| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method for optical waveguide device with which a ridge type structure is accurately processed. SOLUTION: A thinning process is performed after the ridge type structure is formed by (a) the step in which the ridge type structure forming face 16 is built on a first base body 11 composed of a ferroelectric substance, (b) the step in which a second base body 12 is provided which is fitted on the ridge type structure forming face side of the first base body 11 so that a material having a refractive index smaller than that of the first base body is made contact with the ridge type structure forming face of the first base body 11, and (c) a thinning step face 17 is formed by processing the back face which is opposite to the ridge type structure forming face 16 of the first base body. COPYRIGHT: (C)2006,JPO&NCIPI |
