| 摘要 |
PROBLEM TO BE SOLVED: To provide a method capable of controlling the density of carbon nanotubes inexpensively by a conventional carbon nanotube producing apparatus. SOLUTION: A substrate having a catalyst metal layer is charged in a thermochemical vapor phase deposition system and an inert gas and a raw material gas are supplied into the system. Then, the catalyst metal layer is made into fine particles and carbon nanotubes are grown on the formed catalyst fine particles by a thermochemical vapor phase deposition method. At that time, the growth density of the carbon nanotubes is controlled by controlling the concentration change amount of the raw material gas being supplied. "The concentration change amount" means a change amount of the raw material gas being supplied with respect to a time. COPYRIGHT: (C)2006,JPO&NCIPI |
