DISPLACEMENT ESTIMATION SYSTEM AND METHOD

摘要

A system (100 / 700 / 900) comprising a data acquisition system (106) and a processing system (108) is provided. The data acquisition system is configured to capture an image (112) that includes a first instance of a pattern (104A) and a second instance of the pattern (104B) from at least a first substrate (102), and the processing system is configured to calculate a displacement between the first instance and the second instance using the image.