| 摘要 |
PROBLEM TO BE SOLVED: To reduce the cost, and to improve the yield. SOLUTION: Argon ions ionized in a vicinity of a non-smooth area 18b are collided with the non-smooth area 18b of a surface of a target 9, and emit sputter particles from the target 9 to grind the non-smooth area 18b. The sputter particles which are emitted from the non-smooth area 18b, not directed to a glass substrate 13 but directed to a smooth area 18a of a center part, and collided with the smooth area 18a are not re-deposited on the smooth area 18a but dropped because the surface roughness of the smooth area 18a is set to be a predetermined value or under at which at least the anchor effect can be neglected. Thus, the sputter particles are neither deposited on the smooth area 18a to form a projection part, nor dropped after growing to a certain size, nor cause any abnormal discharge. COPYRIGHT: (C)2006,JPO&NCIPI
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