METHOD FOR PRODUCING TITANIUM OXIDE THIN FILM

摘要

PROBLEM TO BE SOLVED: To provide a method capable of producing a porous titanium oxide thin film having a granular surface without causing the complication of a production operation.

SOLUTION: In the method for producing the titanium oxide thin film, a prepared dense multilayer carbon nanotube whose surface is provided with a defective part and/or pores and/or an oxidized part by performing ultrasonic treatment or high-frequency treatment is dispersedly arranged at a glass substrate, and titanium oxide is thereafter vapor-deposited on the carbon nanotube in a gaseous oxygen atmosphere by a laser ablation process.

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