| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing an optical element with which an optical element having high transmittance can be formed while productivity being increased, and a wafer for optical element formation. SOLUTION: The method for manufacturing the optical element includes a step of depositing an aluminum film on a transparent substrate 1, a step of forming separation grooves 4 by removing regions other than element regions 2a of the aluminum film 2, a step of subjecting the element regions 2a of the aluminum film 2 to anodic oxidation, a step of performing steam oxidation on the anodic-oxidized aluminum oxide film 6 and a step of separating the wafer 7 for optical element formation including the aluminum oxide film 6 subjected to steam oxidation along the separation grooves 4. COPYRIGHT: (C)2006,JPO&NCIPI |
