| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a liquid supply device for quantitatively supplying liquid with high accuracy regardless of the viscosity of the liquid and the load on a discharge side. <P>SOLUTION: The liquid supply device comprises a cylinder body 1 having two openings 4a, 4b and a sliding member 2 for sliding on the inner wall face of the cylinder body 1, wherein the sliding member 2 moves along the axis of the cylinder body 1 for the liquid to flow from one of the openings 4a, 4b and to discharge from the other. It has an electric actuator 6 for driving the sliding member 2 and a fluid pressure cylinder 7 for assisting the electric actuator 6 to drive the sliding member 2. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
