| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical observation apparatus in which a modulation operation of an image can be conducted for an objective lens whose exit pupil is located within a lens group. SOLUTION: The optical observation apparatus is provided with an illuminating optical system 110 which illuminates light beams from light sources 121 and 131 onto an object W, an objective lens 140 which is constituted by the combination of a plurality of lens groups and has an exit pupil 141 that is located within the lens groups, an image forming lens 150 which forms an image with the light beams for the object W through the objective lens 140, a pupil relay lens system 160 in which a front side focus is located at the exit pupil 141 of the objective lens 140 and an exit pupil image 163 is formed outside the objective lens 140 relaying through the exit pupil 141 and a modulation element 170 which is arranged at the location of the exit pupil image 163 and conducts modulation of the image that is formed by the image forming lens 150. COPYRIGHT: (C)2006,JPO&NCIPI
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