发明名称 |
MOTIONING EQUIPMENT FOR ELECTRON COLUMN |
摘要 |
<p>Provided is motioning equipment which provides relative motion between electron column emitting electron beam and a sample on which the electron beam is irradiated. The motioning equipment includes multi-microcolumn for emitting electron beams on the sample, supports for supporting the multi-microcolumns, and driving means for driving the supports to move the multi-microcolumns.</p> |
申请公布号 |
WO2006025706(A1) |
申请公布日期 |
2006.03.09 |
申请号 |
WO2005KR02905 |
申请日期 |
2005.09.01 |
申请人 |
CEBT CO. LTD.;KIM, HO SEOB;KIM, BYENG JIN |
发明人 |
KIM, HO SEOB;KIM, BYENG JIN |
分类号 |
(IPC1-7):H01J37/04 |
主分类号 |
(IPC1-7):H01J37/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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