发明名称 |
A MICROMACHINED KNIFE GATE VALVE FOR HIGH-FLOW PRESSURE REGULATION APPLICATIONS |
摘要 |
<p>The present invention discloses a microvalve for providing pneumatic-flow regulation suitable for use in microsystem applications that are operable using highly efficient actuation means for flow obstruction while being space efficient in design in a manner that is suitable for cost effective bullsk microfabrication. In an embodiment of the invention, the microvalve comprises a first substrate layer, a second layer disposed over the first substrate layer cooperating with the first substrate layer to form a channel through which the flow traverses and defines a direction of the flow. An obstruction element or knife gate is micromachined into the second layer such that it is pivotably attached and actuated with a bimorph actuator to displace the gate along a plane that is substantially perpendicular to the direction of the flow in order to controllably regulate the flow. In a further embodiment, a microsystem comprising the microvalve concept of the invention is microfabricated into an IP-converter for pneumatic high flow pressure control applications.</p> |
申请公布号 |
EP1631760(A2) |
申请公布日期 |
2006.03.08 |
申请号 |
EP20040736248 |
申请日期 |
2004.06.07 |
申请人 |
VAN DER WIJNGAART, WOUTER;STEMME, GOERAN;RIDGEWAY, ANTHONY S. |
发明人 |
VAN DER WIJNGAART, WOUTER;STEMME, GOERAN;RIDGEWAY, ANTHONY S. |
分类号 |
F15C5/00;F16K99/00;(IPC1-7):F16K3/02 |
主分类号 |
F15C5/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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