method for cleaning semiconductor device,申请号KR20040057681-传众专利搜索

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发明名称	method for cleaning semiconductor device
摘要
申请公布号	KR100557963(B1)	申请公布日期	2006.03.07
申请号	KR20040057681	申请日期	2004.07.23
申请人		发明人
分类号	H01L21/304	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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