发明名称 VACUUM MAINTENANCE DEVICE FOR HIGH VACUUM CHAMBERS
摘要 <p>An ion pump permits the continuous evacuation of a small-envelope vacuum chamber while drawing a relatively small amount of power (micro watts). In a preferred embodiment, the present ion pump occupies a space enclosed by a first surface of chamber (1), a second surface of chamber (2), a side of chamber (3), and an optically-opaque shield (4). The small size and integration of the ion pump within the vacuum chamber enables the device in which the vacuum chamber is incorporated to be portable and to retain its original dimensions.</p>
申请公布号 WO1996039582(A1) 申请公布日期 1996.12.12
申请号 IB1996000701 申请日期 1996.06.06
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