| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a small size electron emitting element in which carbon nanotubes are arranged in almost perpendicular direction on a cathode electrode, a high emission current can be obtained stably, and which is of low cost and has high reliability, and its manufacturing method. <P>SOLUTION: After an insulating membrane layer is formed on a silicon substrate and a metal membrane layer is formed on top of it, an aperture is provide on the insulating membrane layer and the metal membrane layer by a photolithography and the silicon substrate is exposed. A porous silicon layer is formed by applying a positive electrode conversion treatment on the silicon substrate. An electroplating is applied on the silicon substrate using a plating bath dispersed with carbon nanotubes, and a part of carbon nanotubes are penetrated into the micropores of the porous silicon layer and are thrusted on it, thereby they are fixed in almost perpendicularly on the silicon substrate. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
