| 摘要 |
PROBLEM TO BE SOLVED: To provide a differential pressure measuring system capable of excluding a measurement error resulting from a temperature change, without requiring computer processing. SOLUTION: The system is provided with a light source 4 for emitting light of a first and a second wavelength, a first pressure sensitive section 3 which reflects first reflected light of a first wavelength, a first external pressure and a first temperature are applied to, and has a first thermal expansion coefficient and a first reflection wavelength temperature coefficient being the product of the first thermal expansion coefficient and the first wavelength, a first thermosensitive section 6 which reflects second reflected light of the second wavelength, the first temperature is applied to, and has a second thermal expansion coefficient and a second reflection wavelength temperature coefficient being the product of the second thermal expansion coefficient and the second wavelength, a second pressure sensitive section 13 which reflects third reflected light of the second wavelength, a second external pressure and a second temperature are applied to, and has a second thermal expansion coefficient and a second reflection wavelength temperature coefficient, a second thermosensitive section 16 which reflects fourth reflected light of the first wavelength, a second temperature is applied to, and has the first thermal expansion coefficient and the first reflection wavelength temperature coefficient, and a signal processor 7 for calculating the differential pressure between the first external pressure and the second external pressure, from the fluctuation of the phase difference between a first interference fringe by the first and fourth reflected light and a second interference fringe by the second and third reflected light. COPYRIGHT: (C)2006,JPO&NCIPI
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