| 摘要 |
PROBLEM TO BE SOLVED: To provide a thin film depositing apparatus capable of frequently changing monitor substrates without limiting a material of the monitor substrates. SOLUTION: A monitor substrate mounting device comprises a monitor substrate holder which is provided at the position facing a vapor deposition source via an opening part in a center portion of the substrate holder, an attachable/detachable non-used monitor substrate storage box in which non-used monitor substrates are stacked and stored, an attachable/detachable used monitor substrate storage box in which used monitor substrates are stacked and stored, and a monitor substrate moving means which feeds a monitor substrate to the monitor substrate holder from the non-used monitor substrate storage box, installs the monitor substrate on the monitor substrate holder, and feeds and stores the used monitor substrate from the monitor substrate holder to the used monitor substrate storage box after using the monitor substrate. COPYRIGHT: (C)2006,JPO&NCIPI
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