MEMS MIRROR WITH AMPLIFICATION OF MIRROR ROTATION ANGLE

摘要

A micro-electro-mechanical system (MEMS) mirror device (100) includes a mirror (104) coupled to a rotating frame (108) by a first torsional hinge (106) along a rotational axis (110). The rotating frame has a body that defines a frame opening (116), and a group of rotational teeth (120; 122) extending from the body. A first bonding pad (117) is located in the frame opening and coupled to the rotating frame by a second torsional hinge (118; 119) along the rotational axis. A second bonding pad (114) is coupled to the rotating frame by a third torsional hinge (112) along the rotational axis.