| 摘要 |
PROBLEM TO BE SOLVED: To provide an inexpensive surface acoustic wave device with excellent productivity that can surely prevent a sealing resin part from intruding into an interdigital electrode. SOLUTION: Since an air gap is formed by forming a recessed part 1b to an insulation substrate 2 at a position opposed to an interdigital electrode 7 provided to a piezoelectric substrate 6 in the surface acoustic wave device and a one-side (lower side) of the piezoelectric substrate 6 is brought into contact with an upper side of the insulation substrate 2 located near the entire outer circumferential part of the recessed part 1b, the inside of the recessed part 1b can be sealed with the one-side of the piezoelectric substrate 6 and the upper side of the insulation substrate 6 with high accuracy, the intrusion of the sealing resin part 9 to the interdigital electrode 7 can surely be prevented, and application of resin to form a dam part having been required for prior arts is not needed, and the surface acoustic wave device with excellent productivity and of a low cost can be obtained. COPYRIGHT: (C)2006,JPO&NCIPI
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