SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SUCH A SEMICONDUCTOR DEVICE
摘要
The invention relates to a CMOS device (10) with an NMOST I and PMOST 2 having gate regions (1D,2D) comprising a compound containing both a metal and a further element. According to the invention the first and second conducting material both comprise a compound containing as the metal a metal selected from the group comprising molybdenum and tungsten and both comprise as the further element an element selected from the group comprising carbon, oxygen and the chalcogenides. Preferably both the first and second conducting material comprise a compound of molybdenum and carbon or oxygen. The invention also provides an attractive method of manufacturing such a device.
申请公布号
WO2006021906(A1)
申请公布日期
2006.03.02
申请号
WO2005IB52646
申请日期
2005.08.10
申请人
KONINKLIJKE PHILIPS ELECTRONICS N.V.;HOOKER, JACOB, C.;LANDER, ROBERT;WOLTERS, ROBERTUS, A., M.
发明人
HOOKER, JACOB, C.;LANDER, ROBERT;WOLTERS, ROBERTUS, A., M.