INSPECTING APPARATUS, INSPECTING METHOD AND SENSOR FOR INSPECTING APPARATUS

摘要

A conductor status inspecting apparatus which can accurately detect the status of an inspecting object with no contact in the case where the inspecting object is a conductor. The conductor to be inspected is supplied with an inspection signal from a supplying part. In the vicinity of the conductor, an insulating board is arranged. On the front plane of the insulating board, a plurality of X axis sensor plates are arranged substantially parallel to each other at prescribed intervals, and on the rear plane, a plurality of Y axis sensor plates which substantially orthogonally intersect with the X axis sensor plates are arranged substantially parallel to each other at prescribed intervals. The position of the conductor is detected by comparing the detection signal levels of the sensor plates and by calculating the relative values of the detection signal levels of the sensor plates.