发明名称 WORKING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a method capable of working the object to be worked without using special apparatuses, appliances or the like regardless of the properties of the liquid fed to the object. SOLUTION: The working method comprises: a first stage where a liquid is arranged on the object; and a second stage where a gas is dissolved in the liquid to alter the liquid, and the object is worked with the liquid after the alternation. Further, the first stage is preferably the one where the liquid is arranged by an ink jet method. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006057148(A) 申请公布日期 2006.03.02
申请号 JP20040240677 申请日期 2004.08.20
申请人 SEIKO EPSON CORP 发明人 AOKI TAKASHI
分类号 C23F1/02;G02F1/1345;G02F1/1368;H01L21/28;H01L21/306;H01L21/336;H01L21/768;H01L29/786 主分类号 C23F1/02
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