| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe card capable of easily and surely grasping short circuit between probes. SOLUTION: The probe card 1 includes a pair of probes 2/3 passing current by contacting an IC chip 20 and a substrate 4 forming a continuity path between the pair of cards and exterior. A probe short circuit sensing circuit 6 is provided in the probe card 1. The probe short circuit sensing circuit 6 includes a first wiring 7 one end of which is connected with one of pair of probes; a second wiring 8 one end of which is connected with the other of the pair of probes are provided; a notification means 9 and a power source 10 connected between the other end of the first wiring and the other end of the second wiring; a contact sensing means 11 sensing whether or not a pair of probes are contacting the IC chip; and a switch means 12 placed in the middle of the first wiring and the middle of the second wiring to be OFF when the contact sensing means 11 senses the contact between the pair of probes and the IC chip and to be ON when it senses non-contact between the pair of probes and the IC chip. COPYRIGHT: (C)2006,JPO&NCIPI
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