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发明名称
Fluorinated Acrylic Verbindungen, ihre Herstellungsverfahren und diese enthaltende Photoresistzusammensetzungen
摘要
申请公布号
DE602004000069(T2)
申请公布日期
2006.03.02
申请号
DE20046000069T
申请日期
2004.02.19
申请人
AIR PRODUCTS AND CHEMICALS, INC.
发明人
ABDOURAZAK, ATTEYE HOUSSEIN;MARKLEY, THOMAS JOHN
分类号
C07D309/10;C08F20/28;G03F7/004;G03F7/039;H01L21/027
主分类号
C07D309/10
代理机构
代理人
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