| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a means for carrying out a resist application of a substantially uniform film thickness while preventing the generation of pinholes even if a workpiece has unevenness. <P>SOLUTION: Resist particulates mixed with a gas are sprayed in a misty form from a nozzle 1, and applied to the workpiece W. The speed of the air current carrying the sprayed resist particulates is made to a high speed so that the Reynolds Number Re before the impinging to the workpiece W may reach beyond 4,300. Further, particle Reynolds Number Re' is made to be over 0.27. Re and Re' are calculated by (v×d)/γ, where v is the speed of the air current (mm/sec) carrying the resist particulates, which is calculated by N/π(L×tanθ)<SP>2</SP>[wherein N is a gas flow rate (mm<SP>3</SP>/sec), L is a distance (mm) from the nozzle to the workpiece, and θ is a spread angle (°) of the sprayed resist]. Further, in the calculation of Re, the distance L is used as the d, and in the calculation of Re', a resist particle diameter D is used. Furthermore, γ is a gas dynamic viscosity (mm<SP>2</SP>/sec). <P>COPYRIGHT: (C)2006,JPO&NCIPI |
