METHOD FOR MANUFACTURING DISTRIBUTED DENSITY MASK

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a distributed density mask with high production efficiency, in a small data amount and in a short drawing time when drawing the distributed density mask by an electron beam drawing apparatus.

SOLUTION: This method includes steps of: generating a plurality of outline pattern (P1) data representing contour lines of a three-dimensional shape (1); creating a plurality of tone pattern data for a tone pattern (P2) in the density corresponding to the respective contour lines (2); combining the outline pattern (P1) data and the corresponding tone pattern (P2) data to create a plurality of tone/outline pattern (P3) data by AND operation (3); subjecting the whole tone/outline pattern (P3) data to OR operation to create density distribution data (4); and drawing a mask (PM1) by an electron beam drawing apparatus using the density distribution data (5).

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