| 摘要 |
<p>To achieve space saving and cost reduction by solving a problem with a conventional treatment fluid filtration device wherein a deaerating device and a solid particle filter device were required separately. A filter unit comprises a head part 3 having a treatment fluid inlet port 5, a filtrated fluid delivery port 7, and a deaerating suction port 9; a housing 1 integrally or detachably connected, in a fluid-tight manner, to the head part; a plurality of deaerating hollow fibers 33, which is housed in the housing on the upstream side; and a filter element 13 housed in the housing on the downstream side of the deaerating hollow fibers. The inlet port 5 communicates with the outer surface side of the hollow fibers 33. The delivery port communicates with the downstream side of the filter element 13. The suction port 9 communicates with an internal passage of the hollow fibers 33.</p> |
