发明名称 Laser induced thermal imaging apparatus
摘要 <p>A laser induced thermal imaging apparatus for fabricating an organic light emitting display is provided. The laser induced thermal imaging apparatus includes a stage where a substrate is positioned; a transport device for transporting a donor substrate; a laminator for laminating the substrate to the donor substrate; a laser optical unit for performing the LITI, and a chamber supplied with an atmospheric pressure of an inert gas in which the stage, the laminator, and the laser optical unit are positioned.</p>
申请公布号 EP1630886(A1) 申请公布日期 2006.03.01
申请号 EP20040090515 申请日期 2004.12.23
申请人 SAMSUNG SDI CO., LTD. 发明人 KIM, MU-HYUN;CHIN, BYUNG-DOO;SONG, MYUNG-WON;LEE, SEONG-TAEK
分类号 H01L51/40;B41J2/435;B41M5/26;G03F3/10;H01L27/00;H01L27/32;H01L51/56 主分类号 H01L51/40
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