ELECTRIC DISCHARGE EXCITATION EXCIMER LASER,申请号EP19990973186-传众专利搜索

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发明名称	ELECTRIC DISCHARGE EXCITATION EXCIMER LASER
摘要
申请公布号	EP1137126(A4)	申请公布日期	2006.03.01
申请号	EP19990973186	申请日期	1999.11.26
申请人	EBARA CORPORATION;KOMATSU LTD.	发明人	SHINOZAKI, HIROYUKI;SEKIGUCHI, SHINICHI;BARADA, TOSHIMITSU;NAKAZAWA, TOSHIHARU
分类号	H01S3/036;H01S3/225;(IPC1-7):H01S3/036;F16C32/04	主分类号	H01S3/036
代理机构		代理人
主权项
地址

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