| 发明名称 |
REDUCED DIFFUSION OF A MOBILE SPECIE FROM A METAL OXIDE CERAMIC |
| 摘要 |
A barrier layer is provided to prevent the diffusion of excess mobile specie from a metal oxide ceramic into the substrate. The barrier layer is provided below the metal oxide ceramic, separating it from the substrate below.
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| 申请公布号 |
WO0038247(A1) |
申请公布日期 |
2000.06.29 |
| 申请号 |
WO1999IB02028 |
申请日期 |
1999.12.08 |
| 申请人 |
INFINEON TECHNOLOGIES AG |
发明人 |
HINTERMAIER, FRANK, S. |
| 分类号 |
C23C14/08;H01L21/02;H01L21/28;H01L21/768;H01L21/8246;H01L27/105;(IPC1-7):H01L29/92 |
主分类号 |
C23C14/08 |
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