发明名称 AUTOHANDLER AND METHOD OF MEASURING DEVICES USING THE AUTOHANDLER.
摘要 AN AUTOHANDLER CAPABLE OF EFFECTING THE PRECISE EXTERNALS-EXAMINATION OF DEVICES (10) IN ADDITION TO MEASURING OF THE ELECTRICAL CHARACTERISTICS IN SUBSTANTIALLY THE SAME PERIOD OF TIME AS THAT TAKEN BY MEASURING OF THE ELECTRICAL CHARACTERISTICS ALONE AND A METHOD OF MEASURING DEVICES (L 0) BY THE USE OF THE AUTOHANDLER ARE PROVIDED. A COMPACT AND HIGH PRECISION, AUTOMATIC DEVICE EXTERNALS-EXAMINING APPARATUS IS INCORPORATED IN THE AUTOHANDLER. THE APPARATUS INCLUDES A LIGHTING FIXTURE (29) HAVING A PLURALITY OF BRIGHTNESSCONTROLLABLE LIGHT EMITTING ELEMENTS AND A CAMERA (28) SUCH AS A CCD CAMERA FOR CONVERTING PHOTOGRAPHED IMAGES INTO PIXEL DATA TO BE OUTPUT. OUT OF THE DEVICES (10) WHICH HAVE UNDERGONE THE TESTING FOR THEIR ELECTRICAL CHARACTERISTICS, THOSE WHICH HAVE BEEN SORTED INTO A CATEGORY OR CATEGORIES REQUIRING AN EXTERNALS-EXAMINATION ARE MEASURED FOR THEIR EXTERNALS IN THE EXTERNALS-EXAMINING APPARATUS. THE DEVICES (10) ARE SORTED ON THE BASIS OF THE DATA OF THE TEST RESULTS OF THE ELECTRICAL CHARACTERISTIC TESTING AND THE EXTERNALS-EXAMINING, AND THEN CONVEYED TO CORRESPONDING DEVICESTORAGE MEANS. IT IS THUS TO BE APPRECIATED THAT IT IS POSSIBLE TO AUTOMATICALLY AND ACCURATELY EFFECT THE EXTERNALS-EXAMINATION, NOT TO SPEAK OF THE TESTING OF THE ELECTRICAL CHARACTERISTICS IN ONE PASS THROUGH THE SAME SINGLE AUTOHANDLER. ACCORDINGLY, THE TIME TAKEN BY THE EXTERNALS-INSPECTION MAY GREATLY REDUCED, RESULTING IN AN ENHANCEMENT IN THE THROUGHPUT AND A DECREASE IN THE TESTING COST. (FIG. 1)
申请公布号 MY121566(A) 申请公布日期 2006.02.28
申请号 MYPI9502989 申请日期 1995.10.06
申请人 ADVANTEST CORPORATION 发明人 TOSHIO GOTO;ARITOMO KIKUCHI;HISAO HAYAMA
分类号 G01N21/88;G01R31/26;G01R31/308;H01L21/66 主分类号 G01N21/88
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