METHOD AND DEVICE FOR THREE-DIMENSIONALLY DETERMINING THE REFRACTIVE INDEX OF TRANSPARENT OR PARTIALLY TRANSPARENT LAYERS

摘要

The invention relates to a method and device for three-dimensionally determining the refractive index and, optionally, the layer thickness of transparent or partially transparent layers. According to the invention, polarized light is shone through the layer (1) at different angles of incidence (5), and changes in the polarization of the light when passing through the layer (1) are measured and analyzed. The method is characterized by virtue of the fact that the measurement ensues through an immersion medium (3), between which the layer (1) is inserted. The inventive method permits a highly precise determination of the refractive index of anisotropic thin layers in all three directions in space.